Plasma Diagnostics of Argon-Oxygen Gases Mixture using Different Applied Power in a DC Sputtering System

Authors

  • Huda J. Ali Department of Physics, College of Science, Mustansiriyah University, 10052 Baghdad, IRAQ.
  • Baida M. Ahmed Department of Physics, College of Science, Mustansiriyah University, 10052 Baghdad, IRAQ.
  • Mohammed K. Khalaf Ministry of Higher Education and Scientific Research, 10001 Baghdad, IRAQ. https://orcid.org/0000-0001-5688-6304
  • Ali Albeer Department of biometry and epidemiology, Institute of medical Information processing, Ludwig Maximilian University of Munich, 81377 München, Germany. https://orcid.org/0009-0002-1746-1260

DOI:

https://doi.org/10.23851/mjs.v34i4.1361

Keywords:

DC sputtering, Glow discharge, OES, Plasma diagnostic

Abstract

Sputtering is the process of depositing thin films on the surface of a material using plasma. Plasma is created by adding extremely high energy to a surrounding gas, which turns into plasma. The plasma is directed towards the material on which you want to deposit the films, and the plasma particles interact with the material to form a thin film of the desired material. Oxygen plasma has many important applications in industry. When adding a small percentage of it, it can change the properties of the plasma significantly. In this research, the spectrum of the plasma generated from the application of different energies (175,200,250,300) watts of direct current was studied on a mixture of argon and oxygen gases in a ratio of (9: 1). The spectrum emitted from the plasma was measured Within the wavelength range (400-800) nm, the plasma parameters (Te, ne, λD, ND) were diagnosed by examining the spectrum corresponding to the applied power using optical emission spectroscopy (OES). The results showed an increase in the electron temperature and electron density with the increase in the applied power. Where the highest and lowest values for the electron temperature and density were respectively (1.645-1.305) eV, (26.03-25.36) x 1017/cm3.

 

 

 

 

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References

A. D. Soriano, J. M. A. Pelegrina, A. Sarsa, M. S. Dimitrijević, C. Yubero, " A simple and accurate analytical model of the Stark profile and its application to plasma characterization", Journal of Quantitative Spectroscopy and Radiative Transfer, vol. 207, 2018, pp. 89-94.

CrossRef

A. Barkhordari, A. Ganjovi "Technical characteristics of a DC plasma jet with Ar/N2 and O2/N2 gaseous mixtures" Chinese Journal of Physics, V.57, P.465-478, ISSN 0577-9073,.2018

CrossRef

S. Rassou, A.Piquemal, N.Merbahi, F.Marchal, M.Yousfi "Experimental characterization of argon/air mixture microwave plasmas using optical emission spectroscopy", Journal of Molecular Spectroscopy, 370,2020,111278,ISSN0022-2852.

CrossRef

M. K. Khalaf, A.N. A. Al-Gaffer, and H. Mohsin '' Estimation of plasma parameters in vanadium magnetron sputtering using optical emission spectroscopy at different experimental formation conditions '' AIP Conference Proceedings 2290, 050040. 2020

CrossRef

A. G. Carbone, P. J. Bruggeman, J. d. Mullen, " Laser scattering on an atmospheric pressure plasma jet: disentangling Rayleigh, Raman and Thomson scattering", Plasma Sources Science Technology, vol. 21, 2012.

CrossRef

B. M. Ahmed, R. A. Abdulrazaq, M. A. Khalaf, O. A. A. Dakhil, "Parameters for Fe₂O₃ On Staphylococcus Aureus And Acinetobacter Baumannil", Journal of Engineering Science and Technology, vol. 17, 2022, pp. 0552 - 0562.

X.Z.Jiang, W.liang LI, T.Wumeier, H.Binxao, "Diagnostic study of argon and oxygen mixtures in dual-frequency capacitively coupled plasmas using quadrupole mass spectrometer" Chemical Physics Letters, Vol. 730, 2019, Pages 472-477

CrossRef

Y. K. Jabur, M. Gh. Hammed, M.K. Khalaf, "DC Glow Discharge Plasma Characteristics in Ar/O2 Gas Mixture", Iraqi Journal of Science, 2021, Vol. 62, No. 2, pp: 475-482.

CrossRef

P. Attri, Y. H. Kim, D. H. Park, J. H. Park, Y. J. Hong, H. S. Uhm, K. N. Kim, A. Fridman, E. H. Choi, "Generation mechanism of hydroxyl radical species and its lifetime prediction during the plasma-initiated ultraviolet (UV) photolysis", Scientific Reports, vol. 5(1), 2015.

CrossRef | PubMed

Z. Chen, G. Chen, R. Obenchain, R. Zhang, F. Bai, T. Fang, H. Wang, Y. Lu, R. E. Wirz, Z. Gu, "Cold atmospheric plasma delivery for biomedical applications", materialstoday, vol. 54, 2022, pp. 153-188.

CrossRef

B. M. Ahmed ''Plasma Parameters Generated from Iron Spectral Lines By Using LIBS Technique'' Materials Science and Engineering. : Materials Science and Engineering 928 (2020) 072096.

CrossRef

Hiroshi Akatsuka ''Optical Emission Spectroscopic (OES) analysis for diagnostics of electron density and temperature in non-equilibrium argon plasma based on collisional-radiative model'' Informa UK Limited, trading as Taylor & Francis group . 2019.

CrossRef

A. Y. Nikiforov, C. Leys, M. A. Gonzalez, J. L. Walsh, " Electron density measurement in atmospheric pressure plasma jets: Stark broadening of hydrogenated and non-hydrogenated lines", Plasma Sources Science Technology, vol. 24, 2015.

CrossRef

Da. Mei, X. Shen, S. Liu, R. Zhou, X. Yuan, Z. Rao, Y. Sun, Z. Fang, X. Du, Y. Zhou, X. Tu, "Plasma-catalytic reforming of biogas into syngas over Ni-based bimetallic catalysts", Chemical Engineering Journal, vol. 462, 2023.

CrossRef

U.G. M. Ekanayake, D. H. Seo, K. Faershteyn, A. P. O'Mullane, H. Shon, J. MacLeod, D. Golberg, K. (Ken) Ostrikov, "Atmospheric-pressure plasma seawater desalination: Clean energy, agriculture, and resource recovery nexus for a blue planet", Sustainable Materials and Technologies, vol. 25, 2020.

CrossRef

P. Ji, H. Jin, D. Li, X. Su, B. Wang, " Thermal analysis of inductively coupled atmospheric pressure plasma jet and its effect for optical processing", Optik, vol. 185, 2019, pp. 381-389.

CrossRef

A. Qayyum, S. Zeb, M. A. Naveed, S. A. Ghauri, A. Waheed and M. Zakaullah, "Optical emission spectroscopy of the active species in nitrogen plasma", Plasma Devices and Operations, (2007).

CrossRef

P. Lamichhane, R. Paneru, L. N. Nguyen, J. S. Lim, P. Bhartiya, B. C. Adhikari, S. Mumtaz, E. H. Choi, " Plasma-assisted nitrogen fixation in water with various metals", Reaction Chemistry & Engineering, 2020.

CrossRef

A.L. Gobbi ''DC sputtering'' In book: Encyclopedia of Tribology (pp.699-706) Springer International Publishing AG 2013

CrossRef | PubMed

M. Hosseinpour, A. Zendehnam, S. M. H. Sangdehi, H. G. Marzdashti, " Effects of different gas flow rates and non‑perpendicular incidence angles of argon cold atmospheric‑pressure plasma jet on silver thin film treatment", Journal of Theoretical and Applied Physics, vol. 13, 2019, pp. 329-349.

CrossRef

National Institute of Standards and Technology (NIST) Atomic Spectra Database, (version 5). Available at http://physics.nist.gov/asd3, last updated: September 16, 2022

A. Brudnik, A. Czapla, W. Posadowski, "Studies of medium frequency high power density magnetron sputtering discharges", Vacuum, Vol.82, Issue 10 2008,Pp.1124-1127..

CrossRef

Downloads

Published

30-12-2023

Submission Dates

Received: 01/04/2023

Revised: 09/05/2023, 02/06/2023

Accepted: 10/06/2023

How to Cite

[1]
H. J. Ali, B. M. Ahmed, M. K. . Khalaf, and A. . Albeer, “Plasma Diagnostics of Argon-Oxygen Gases Mixture using Different Applied Power in a DC Sputtering System”, Al-Mustansiriyah Journal of Science, vol. 34, no. 4, pp. 110–115, Dec. 2023.

Issue

Section

Physical Sciences

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