Enhancement of SnO2 for gas sensing applications
DOI:
https://doi.org/10.23851/mjs.v32i3.971Abstract
Thin films of SnO2 were deposited by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at room temperature. XRD, SEM, and EDX measurements of thin films were investigated. Annealing of SnO2 thin films at 800 °С is polycrystalline and grain size of SnO2 in the range about 12 nm. The growth of SnO2 with annealing to 800 °C leads to the percolation nanorods structure. EDX clearly explains the rich of Sn reached 70% annealing. The conductivity of SnO2 nanorods has been increasing at room temperature for ethanol vapors.
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C. A. Betty, S. Choudhury, and K. G. Girija, "Reliability studies of highly sensitive and specific multi-gas sensors based on nanocrystalline SnO2 film," Sensors and Actuators B: Chemical, vol. 193, pp. 484-491, 2014/03/31/ 2014.
K. Wang, T. Zhao, G. Lian, Q. Yu, C. Luan, Q. Wang, and D. Cui, "Room temperature CO sensor fabricated from Pt-loaded SnO2 porous nanosolid," Sensors and Actuators B: Chemical, vol. 184, pp. 33-39, 2013/07/31/ 2013.
Q. Wan, J. Huang, Z. Xie, T. Wang, E. N. Dattoli, and W. Lu, "Branched SnO2 nanowires on metallic nanowire backbones for ethanol sensor application," Applied Physics Letters, vol. 92, no. 10, p. 102101, 2008.
J. Kaur, R. Kumar, and M. C. Bhatnagar, "Effect of indium-doped SnO2 nanoparticles on NO2 gas sensing properties," Sensors and Actuators B: Chemical, vol. 126, no. 2, pp. 478-484, 2007/10/01/ 2007.
N. S. Ramgir, I. S. Mulla, and K. P. Vijayamohanan, "A room temperature nitric oxide sensor actualized from Ru-doped SnO2 nanowires," Sensors and Actuators B: Chemical, vol. 107, no. 2, pp. 708-715, 2005/06/29/ 2005.
J. Kaur, S. C. Roy, and M. C. Bhatnagar, "Highly sensitive SnO2 thin film NO2 gas sensor operating at low temperature," Sensors and Actuators B: Chemical, vol. 123, no. 2, pp. 1090-1095, 2007/05/21/ 2007.
Y. Shen, T. Yamazaki, Z. Liu, D. Meng, T. Kikuta, N. Nakatani, M. Saito, and M. Mori, "Microstructure and H2 gas sensing properties of undoped and Pd-doped SnO2 nanowires," Sensors and Actuators B: Chemical, vol. 135, no. 2, pp. 524-529, 2009/01/15/ 2009.
S. Shukla, P. Zhang, H. J. Cho, S. Seal, and L. Ludwig, "Room temperature hydrogen response kinetics of nano-micro-integrated doped tin oxide sensor," Sensors and Actuators B: Chemical, vol. 120, no. 2, pp. 573-583, 2007/01/10/ 2007.
D. Haridas, A. Chowdhuri, K. Sreenivas, and V. Gupta, "Enhanced room temperature response of SnO2 thin film sensor loaded with Pt catalyst clusters under UV radiation for LPG," Sensors and Actuators B: Chemical, vol. 153, no. 1, pp. 152-157, 2011/03/31/ 2011.
S. Astié, A. M. Gué, E. Scheid, and J. P. Guillemet, "Design of a low power SnO2 gas sensor integrated on silicon oxynitride membrane," Sensors and Actuators B: Chemical, vol. 67, no. 1, pp. 84-88, 2000/08/10/ 2000.
K. Hieda, T. Hyodo, Y. Shimizu, and M. Egashira, "Preparation of porous tin dioxide powder by ultrasonic spray pyrolysis and their application to sensor materials," Sensors and Actuators B: Chemical, vol. 133, no. 1, pp. 144-150, 2008/07/28/ 2008.
Y. Shen, T. Yamazaki, Z. Liu, D. Meng, and T. Kikuta, "Hydrogen sensing properties of Pd-doped SnO2 sputtered films with columnar nanostructures," Thin Solid Films, vol. 517, no. 21, pp. 6119-6123, 2009/09/01/ 2009.
L. Fields, J. Zheng, Y. Cheng, and P. Xiong, "Room-temperature low-power hydrogen sensor based on a single tin dioxide nanobelt," Applied Physics Letters, vol. 88, no. 26, p. 263102, 2006.
M. Anand, "Study of tin oxide for hydrogen gas sensor applications," 2005.
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